Device Fabrication

Microelectronic Device Fabrication


Microlithography and micro-device fabrication have been at the core of the work of both the Minnesota Nano Center (MNC) and the Center for Nanoscale Science and Engineering (CNSE) for decades.

CNSE at North Dakota State University

The Center for Nanoscale Science and Engineering has established world-class capabilities in electronics miniaturization, and supports R&D in advanced electronics packaging. Facilities include 6,500 square feet of class 100 and class 10,000 cleanroom space to support electronics research, development, miniaturization, and prototyping. CNSE supports research and product development in

  • Chip-scale and advanced semiconductor packaging
  • Sapphire processing capability
  • Flip chip, sensors, and MEMS
  • Fluidic self-assembly
  • Flexible electronics
  • Laser-assisted assembly processing
  • RFID systems


MNC at the University of Minnesota

The MNC recently added a new 5000 square foot class 100 cleanroom and powerful new tools for high resolution lithography capable of making features as small as 10 nanometers.  Recent projects include
  • Integrated circuits
  • Microelectromechanical systems (MEMS)
  • Micro-optical systems
  • Microfluidic systems
  • Chemical sensors
  • Biomedical devices