Capabilities and Equipment

The Minnesota Nano Center has over $30 million of equipment in place and operational for

  • Optical, imprint, and electron beam lithography
  • Thin film deposition of metals, alloys, and ceramic compounds
  • Annealing, oxidation, and doping of substrates
  • Wet etching, reactive ion etching, and ion milling
  • Optical mask development

More information on MNC capabilities