Device Fabrication

Microelectronic Device Fabrication


Microlithography and micro-device fabrication have been at the core of our work for decades.

The Minnesota Nano Center (MNC) at the University of Minnesota

The MNC maintains two class 100 cleanrooms and a full tool set for advanced micro- and nanolithography. The Center recently added powerful new tools for high resolution lithography capable of making features as small as 10 nanometers.  Recent device fabrication projects include
  • Integrated circuits
  • Microelectromechanical systems (MEMS)
  • Micro-optical systems
  • Microfluidic systems
  • Chemical sensors
  • Biomedical devices


CAEDM at North Dakota State University

The Center of Excellence for Electronic Design and Manufacturing has established world-class capabilities in electronics miniaturization, and supports R&D in advanced electronics packaging. Facilities include 6,500 square feet of class 100 and class 10,000 cleanroom space to support electronics research, development, miniaturization, and prototyping. CNSE supports research and product development in

  • Chip-scale and advanced semiconductor packaging
  • Sapphire processing capability
  • Flip chip, sensors, and MEMS
  • Fluidic self-assembly
  • Flexible electronics
  • Laser-assisted assembly processing
  • RFID systems